Gas viscosity sensing based on the electrostatic pull-in timeof microactuators
Journal Article
(2014)
Author(s)
RA Dias (External organisation)
G. de Graaf (TU Delft - Electronic Instrumentation)
R. F. Wolffenbuttel (TU Delft - Electronic Instrumentation)
LA Machado da Rocha (External organisation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1016/j.sna.2014.05.004
To reference this document use:
https://resolver.tudelft.nl/uuid:2bdb305d-cb63-456b-af63-ab68f16d1417
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Publication Year
2014
Language
English
Research Group
Electronic Instrumentation
Volume number
216
Pages (from-to)
376-385
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