A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

Conference Paper (2011)
Author(s)

V. Rajaraman (TU Delft - Electronic Instrumentation)

BS Hau (External organisation)

LA Machado da Rocha (TU Delft - Electronic Instrumentation)

RA Dias (External organisation)

K. A. A. Kofi (TU Delft - Electronic Instrumentation)

Ronald Dekker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/TRANSDUCERS.2011.5969225
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
2066-2069
ISBN (print)
978-1-4577-0156-6

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