A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

Conference paper (2011)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
BS Hau External organisation
LA Rocha Electronic Instrumentation - EEMCS
RA Dias External organisation
K.A.A. Makinwa Electronic Instrumentation - EEMCS
R. Dekker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation