Time based micro-g accelerometer with improved damper geometry

Conference paper (2010)

Authors

RA Dias External organisation
LA Rocha Electronic Instrumentation - EEMCS
L Mol Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
E Cretu External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation