Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
Conference Paper
(2007)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:8187b31f-1601-4f28-b156-677b85159241
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
1464-1468
ISBN (print)
1-4244-0755-9
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