Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
Journal Article
(2009)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:de837944-af2d-40c1-8990-654fa2271ba6
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Publication Year
2009
Research Group
Electronic Instrumentation
Volume number
19
Pages (from-to)
074020(1)-074020(5)
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