Improved damper geometry for parallel-plate MEMS
Conference Paper
(2009)
Author(s)
R. Dias (External organisation)
L Mol (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
Reinoud Wolfenbuttel (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:39d9b5de-3e92-4579-b786-fb9e54cd95a9
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
2-907801-08-2
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