Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Conference Paper
(2009)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:bcd40719-f55b-4b32-b56f-47c57fa4b538
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1425-1428
ISBN (print)
978-1-4244-4193-8
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