Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Journal Article
(2009)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:93a23205-650b-4017-ad8b-1027ea2822d1
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Publication Year
2009
Research Group
Electronic Instrumentation
Volume number
19
Pages (from-to)
074021(1)-074021(2)
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