Surface micromachined CMOS compatible vertical accelerometer
Conference Paper
(2003)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:0304ec9f-ab09-4173-8648-d6bf824a81d7
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
707-710
ISBN (print)
90-73461-39-1
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