Formation of location-controlled crystalline islands using substrate-embedded seeds in excimer-laser crystallization of silicon films

Journal Article (2001)
Author(s)

PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)

BD van Dijk (TU Delft - Electronic Components, Technology and Materials)

GJ Bertens (TU Delft - Electronic Components, Technology and Materials)

Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)

Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Issue number
12
Volume number
79
Pages (from-to)
1819-1921

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