Determination of line edge roughness in low-dose top-down scanning electron microscopy images
Journal Article
(2014)
Author(s)
T. Verduin (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
C. W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0372a412-b444-4e29-b291-8b2a50effa3d
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Publication Year
2014
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
3
Volume number
13
Pages (from-to)
1-10
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