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Improved PECVD processed hydrogenated germanium films through temperature induced densification

Journal Article (2022)
Author(s)

Thierry de Vrijer (TU Delft - Photovoltaic Materials and Devices)

Julian E.C. van Dingen (Student TU Delft)

Paul J. Roelandschap (Student TU Delft)

Koos Roodenburg (Student TU Delft)

Arno H.M. Smets (TU Delft - Photovoltaic Materials and Devices)

DOI related publication
https://doi.org/10.1016/j.mssp.2021.106285 Final published version
More Info
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Publication Year
2022
Language
English
Related content
Volume number
138
Article number
106285
Pages (from-to)
1-7
Downloads counter
302
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Institutional Repository
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Abstract

Amorphous and nano-crystalline germanium is of potential interest for a wide range of electronic, optical, opto-electronic and photovoltaic applications. In this work the influence of deposition temperature on hydrogenated germanium (Ge:H) films was characterized, using over 200 Ge:H and over 70 SiGe:H films. The demonstrated temperature-induced densification of Ge:H films resulted in more stable films with a lower bandgap energy and dark conductivity and higher activation energy.