One nanometer structure fabrication using electron beam induced deposition

Journal Article (2006)
Author(s)

WF van Dorp (TU Delft - ImPhys/Charged Particle Optics)

Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)

P.A. A. Crozier (External organisation)

B van Someren (TU Delft - ImPhys/Charged Particle Optics)

Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
4-9
Volume number
83
Pages (from-to)
1468-1470

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