One nanometer structure fabrication using electron beam induced deposition
Journal Article
(2006)
Author(s)
WF van Dorp (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
P.A. A. Crozier (External organisation)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0438a20e-8dce-4a54-a10b-2ba6a11d0894
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
4-9
Volume number
83
Pages (from-to)
1468-1470
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