Carbon nanotubes TSV grown on an electrically conductive ZrN support layer
Conference Paper
(2015)
Author(s)
S Vollebregt (TU Delft - Electronic Components, Technology and Materials)
S. Banerjee (External organisation)
F.D. Tichelaar (QN/High Resolution Electron Microscopy)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/IITC-MAM.2015.7325667
To reference this document use:
https://resolver.tudelft.nl/uuid:0438fae9-caff-41f3-9dfb-3c4d91fed38b
More Info
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Publication Year
2015
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
281-284
ISBN (print)
978-1-4673-7356-2
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