Etching and passivation of silicon in alkaline solution: a coupled chemical/electrochemical system

Journal article (2001)

Authors

XH Xia External organisation
CMA Ashruf Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
J Rappich External organisation
JJ Kelly External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation