Etching and passivation of silicon in alkaline solution: a coupled chemical/electrochemical system
Journal Article
(2001)
Author(s)
XH Xia (External organisation)
Colin Ashruf (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
J Rappich (External organisation)
JJ Kelly (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:05662d96-5c58-4c89-8b14-a6ab019b3d99
More Info
expand_more
expand_more
Publication Year
2001
Research Group
Electronic Instrumentation
Volume number
105
Pages (from-to)
5722-5729
No files available
Metadata only record. There are no files for this record.