Micromachining techniques using layers grown in an epitaxial reactor
Doctoral Thesis
(1999)
Author(s)
PTJ Gennissen (External organisation)
University
Delft University of Technology
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https://resolver.tudelft.nl/uuid:05844368-cf4d-421b-ae73-22633e42bcdd
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Publication Year
1999
University
Delft University of Technology
ISBN (print)
90-407-1843-1
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