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PTJ Gennissen
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5 records found
Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)
Conference paper -
H Ohji
,
PTJ Gennissen
,
P.J. French
,
K Tsutsumi
Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)
Journal article -
H Ohji
,
PTJ Gennissen
,
P.J. French
,
K Tsutsumi
Development of silicon accelerometers using epi-micromachining
Conference paper -
PTJ Gennissen
,
P.J. French
Micromachining techniques using layers grown in an epitaxial reactor
Doctoral thesis -
PTJ Gennissen
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Conference paper -
PTJ Gennissen
,
H Ohji
,
P.J. French
,
CMA Ashruf
,
GMO O Halloran
,
Pasqualina M Sarro