Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Micromachining techniques using layers grown in an epitaxial reactor

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Development of silicon accelerometers using epi-micromachining