Development of silicon accelerometers using epi-micromachining
Conference Paper
(1999)
Author(s)
PTJ Gennissen (External organisation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:2216212c-3695-4d33-86f3-a7c73f0f1e39
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
84-92
ISBN (print)
0-8194-3473-6
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