Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)
Journal Article
(2000)
Author(s)
H Ohji (External organisation)
PTJ Gennissen (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:55dd8f44-9ec6-438f-9b67-a2a73ac0054c
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Publication Year
2000
Research Group
Electronic Instrumentation
Issue number
3
Volume number
10
Pages (from-to)
440-444
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