Person | TU Delft Repository

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Conference paper - H Ohji, PTJ Gennissen, P.J. French, K Tsutsumi

Macroporous based micromachining on full wafers

Conference paper - H Ohji, S Izuo, P.J. French, K Tsutsumi

Study of electrochemical etching for 3-D device design

Conference paper - S Izuo, H Ohji, K Tsutsumi, P.J. French

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Conference paper - H Ohji, P.J. French, K Tsutsumi

Single step electrochemical etching in ammonium fluoride

Journal article - H Ohji, P.J. French

Fabrication of mechanical structures using macro-porous silicon

Conference paper - H Ohji, S Izuo, P.J. French, K Tsutsumi

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Journal article - H Ohji, P.J. French, K Tsutsumi

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Journal article - H Ohji, PTJ Gennissen, P.J. French, K Tsutsumi

Initial pits for electrochemical etching in hydrofluoric acid

Journal article - H Ohji, P.J. French, S Izuo, K Tsutsumi

Macroporous-based micromachining on full wafers

Journal article - H Ohji, S Izuo, P.J. French, K Tsutsumi

Fabrication of mechanical structures using macro-porous silicon

Conference paper - H Ohji, P.J. French, S Izuo, K Tsutsumi

Electrochemical etching for n-type silicon using a novel etchant

Conference paper - S Izuo, H Ohji, P.J. French, K Tsutsumi

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Conference paper - H Ohji, S Izuo, P.J. French, K Tsutsumi

Initial pits for electrochemical etching in hydrofluoric acid

Conference paper - H Ohji, P.J. French, S Izuo, K Tsutsumi

Fabrication of a DNA separation chip using macroporous silicon micromachining

Conference paper - H Ohji, S Izuo, P.J. French, K Tsutsumi

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Conference paper - PTJ Gennissen, H Ohji, P.J. French, CMA Ashruf, GMO O Halloran, Pasqualina M Sarro

H Ohji

Authored

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Macroporous based micromachining on full wafers

Study of electrochemical etching for 3-D device design

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Single step electrochemical etching in ammonium fluoride

Fabrication of mechanical structures using macro-porous silicon

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Initial pits for electrochemical etching in hydrofluoric acid

Macroporous-based micromachining on full wafers

Fabrication of mechanical structures using macro-porous silicon

Electrochemical etching for n-type silicon using a novel etchant

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of a DNA separation chip using macroporous silicon micromachining

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps