Fabrication of a DNA separation chip using macroporous silicon micromachining

Fabrication of mechanical structures using macro-porous silicon

Macroporous-based micromachining on full wafers

Fabrication of mechanical structures using macro-porous silicon

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Electrochemical etching for n-type silicon using a novel etchant

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Initial pits for electrochemical etching in hydrofluoric acid

Macroporous based micromachining on full wafers

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Study of electrochemical etching for 3-D device design

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Single step electrochemical etching in ammonium fluoride

Fabrication of mechanical structures in p-type silicon using electrochemical etching