Macroporous based micromachining on full wafers
Conference Paper
(2000)
Author(s)
H Ohji (External organisation)
S Izuo (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:db75f7e0-cbea-45b1-bbaa-c261ccf2530d
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
415-418
ISBN (print)
87-89935-50-0
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