Fabrication of mechanical structures using macro-porous silicon

Macroporous-based micromachining on full wafers

Fabrication of mechanical structures using macro-porous silicon

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Electrochemical etching for n-type silicon using a novel etchant

Fabrication of a DNA separation chip using macroporous silicon micromachining

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Study of electrochemical etching for 3-D device design

Macroporous based micromachining on full wafers

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Single step electrochemical etching in ammonium fluoride

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of mechanical structures in p-type silicon using electrochemical etching