Fabrication of mechanical structures in p-type silicon using electrochemical etching
Conference Paper
(1999)
Author(s)
H Ohji (External organisation)
Paddy French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:d644a12e-2cb3-4026-9c6a-350e12998154
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
1086-1089
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