Fabrication of mechanical structures using macro-porous silicon
Conference Paper
(2001)
Author(s)
H Ohji (External organisation)
S Izuo (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:49e906b5-1a6f-4fad-ae70-fe2c6bc23407
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
96-103
ISBN (print)
0-8194-4322-0
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