Fabrication of mechanical structures using macro-porous silicon

Conference Paper (2001)
Author(s)

H Ohji (External organisation)

S Izuo (External organisation)

P.J. French (TU Delft - Electronic Instrumentation)

K Tsutsumi (External organisation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
96-103
ISBN (print)
0-8194-4322-0

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