Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Conference paper (1999)

Authors

PTJ Gennissen External organisation
H Ohji External organisation
P.J. French Electronic Instrumentation - EEMCS
CMA Ashruf Electronic Instrumentation - EEMCS
GMO O Halloran External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
More Info
expand_more

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation