Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Conference paper (1999)

Authors

H Ohji External organisation
PTJ Gennissen External organisation
P.J. French Electronic Instrumentation - EEMCS
K Tsutsumi External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation