Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)
Conference Paper
(1999)
Author(s)
H Ohji (External organisation)
PTJ Gennissen (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:cd177f71-6689-4045-8b4b-49c5bfd2a203
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
1-5
ISBN (print)
0-7803-5197-5
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