Macroporous-based micromachining on full wafers
Journal Article
(2001)
Author(s)
H Ohji (External organisation)
S Izuo (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:f1acfd79-f1c9-4d91-ac7b-fc59f0af65de
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Publication Year
2001
Research Group
Electronic Instrumentation
Volume number
92
Pages (from-to)
384-387
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