Macroporous-based micromachining on full wafers

Journal Article (2001)
Author(s)

H Ohji (External organisation)

S Izuo (External organisation)

P.J. French (TU Delft - Electronic Instrumentation)

K Tsutsumi (External organisation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2001
Research Group
Electronic Instrumentation
Volume number
92
Pages (from-to)
384-387

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