Fabrication of mechanical structures in p-type silicon using electrochemical etching
Journal Article
(2000)
Author(s)
H Ohji (External organisation)
Paddy French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:0b0b7764-153e-4705-a127-8839c9ab9337
More Info
expand_more
expand_more
Publication Year
2000
Research Group
Electronic Instrumentation
Volume number
82
Pages (from-to)
254-258
No files available
Metadata only record. There are no files for this record.