Study of electrochemical etching for 3-D device design
Conference Paper
(2000)
Author(s)
S Izuo (External organisation)
H Ohji (External organisation)
K Tsutsumi (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:e26b5c8e-d286-4dc5-8b30-5da2afbcd03d
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
267-270
ISBN (print)
4-88686-030-3
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