Fabrication of mechanical structures using macro-porous silicon
Conference Paper
(2001)
Author(s)
H Ohji (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
S Izuo (External organisation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:07984489-13c5-429d-837a-a9084f1061ae
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
95-100
ISBN (print)
0-7923-7012-0
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