Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Micromachining techniques using layers grown in an epitaxial reactor

Development of silicon accelerometers using epi-micromachining

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps