Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.
Journal Article
(1999)
Author(s)
NN Iossad (TU Delft - QN/Fysics of NanoElectronics)
BD Jackson (TU Delft - QN/Fysics of NanoElectronics)
F. Ferro (External organisation)
JR Gao (TU Delft - QN/Fysics of NanoElectronics)
SN Polyakov (External organisation)
P Dimitriev (External organisation)
Teunis M. Klapwijk (TU Delft - QN/Fysics of NanoElectronics)
Research Group
QN/Fysics of NanoElectronics
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https://resolver.tudelft.nl/uuid:06b6f911-e7b8-43d4-8c75-78782c855dd2
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Publication Year
1999
Research Group
QN/Fysics of NanoElectronics
Volume number
12
Pages (from-to)
1-5
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