Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

Journal article (1999)

Authors

N Iossad QN/Fysics of NanoElectronics
BD Jackson QN/Fysics of NanoElectronics
F. Ferro External organisation
JR Gao QN/Fysics of NanoElectronics
SN Polyakov External organisation
P Dimitriev External organisation
T.M. Klapwijk QN/Fysics of NanoElectronics
Research Group
QN/Fysics of NanoElectronics
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Published Date

1999

Language

Undefined/Unknown

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Research Group

QN/Fysics of NanoElectronics