Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy
Report
(2001)
Author(s)
E Oliveiro (External organisation)
A van Veen (TU Delft - Old - Section Defects in Materials)
AV Fedorov (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Bibliographical Note
IRI-DM-2001-003@en
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