Helium implantation induced defects in Si and SiC studied by thermal helium desorption spectroscopy

Report (2001)

Authors

E Oliveiro External organisation
A van Veen Old - Section Defects in Materials
AV Fedorov Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials