Lithographic alignment offset compensation for substrate transfer processes
Conference Paper
(2005)
Author(s)
H.W. Van Zeijl (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
FGC Bijnen (External organisation)
E.J.G. Goudena (TU Delft - Old - EWI Sect. ECTM)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:075615f1-32c8-4c66-b0d9-0371c4c39436
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
121-126
ISBN (print)
90-73461-50-2
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