Arbitrarily shallow arsenic deposited junctions on silicon tuned by excimer laser annealing

Lorito, G.; Qi, L; Nanver, LK

Arbitrarily shallow arsenic deposited junctions on silicon tuned by excimer laser annealing

Conference paper (2010)

Authors

G. Lorito Electronic Components, Technology and Materials

L Qi External organisation

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2010

Language

English

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Research Group

Electronic Components, Technology and Materials

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