Development of deep dry etching for intelligent mocromachine devices.

Report (2001)
Author(s)

MA Blauw (TU Delft - QN/Kavli Nanolab Delft)

MF Craciun (TU Delft - QN/Fysics of NanoElectronics)

EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)

P. J. French (TU Delft - Electronic Instrumentation)

Research Group
QN/Kavli Nanolab Delft
More Info
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Publication Year
2001
Research Group
QN/Kavli Nanolab Delft

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