Library
search
Press enter to search in title/abstract
in title/abstract
in authors
local_library
Repository
M
MA Blauw
Academic Work (34)
Book chapter (1)
Conference paper (17)
Doctoral thesis (1)
Journal article (12)
Report (3)
Sort by descending (newest to oldest)
Sort by ascending (oldest to newest)
34 records found
1
2
Climate change resistant coastline by biological in-situ reinforcement of sand
Conference paper (2008) -
MA Blauw (author)
,
MP Harkes (author)
,
Mark C.M. van Loosdrecht (author)
,
L.A. van Paassen (author)
,
MA Van (author)
,
M vd Ruyt (author)
Deep reactive ion etching in through-silicon via technology
Book chapter (2007) -
F Roozeboom (author)
,
MA Blauw (author)
,
Y Lamy (author)
,
E van Grunsven (author)
,
W Dekkers (author)
,
JF Verhoeven (author)
,
F van den Heuvel (author)
,
E.W.J.M. van der Drift (author)
,
W. M.M. Kessels (author)
,
MCM van de Sanden (author)
Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias
Conference paper (2006) -
M.A. Wank (author)
,
I Martin (author)
,
MA Blauw (author)
,
R.A.C.M.M. van Swaaij (author)
,
MCM van de Sanden (author)
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Doctoral thesis (2004) -
MA Blauw (author)
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Journal article (2004) -
LD Jiang (author)
,
NOV Plank (author)
,
MA Blauw (author)
,
R Cheung (author)
,
E.W.J.M. van der Drift (author)
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
Journal article (2003) -
NOV Plank (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
R Cheung (author)
Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation
Journal article (2003) -
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
G Marcos (author)
,
A Rhallabi (author)
Processing of inertial sensors using SF6-O2 Cryogenic plasma process
Conference paper (2003) -
G Craciun (author)
,
H Yang (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
Conference paper (2003) -
G Craciun (author)
,
H Yang (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
Conference paper (2002) -
G Craciun (author)
,
H Yang (author)
,
H.W. van Zeijl (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Advanced time-multiplexed plasma etching of high aspect ratio silicon structures
Journal article (2002) -
MA Blauw (author)
,
G Craciun (author)
,
W.G. Sloof (author)
,
P.J. French (author)
,
E.W.J.M. van der Drift (author)
Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope
Conference paper (2002) -
G Craciun (author)
,
H Yang (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Journal article (2002) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
Pasqualina M Sarro (author)
,
P.J. French (author)
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures.
Conference paper (2001) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
Conference paper (2001) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
Pasqualina M Sarro (author)
,
P.J. French (author)
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.
Conference paper (2001) -
MA Blauw (author)
,
G Craciun (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
Conference paper (2001) -
MA Blauw (author)
,
G Cracium (author)
,
P.J. French (author)
Balancing the etching and passivation in time-multiplexed deep dry etching of silicon.
Journal article (2001) -
MA Blauw (author)
,
T Zijlstra (author)
,
E.W.J.M. van der Drift (author)
Development of deep dry etching for intelligent mocromachine devices.
Report (2001) -
MA Blauw (author)
,
MF Craciun (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures
Conference paper (2001) -
G Cracium (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)