MA Blauw

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Book chapter (1)

Conference paper (1)

2 records found

Deep reactive ion etching in through-silicon via technology

Book chapter (2007) - F Roozeboom , MA Blauw , Y Lamy , E van Grunsven , W Dekkers , JF Verhoeven , F van den Heuvel , EWJM van der Drift , WMM Kessels , MCM van de Sanden

Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures

Conference paper (2001) - G Cracium , MA Blauw , EWJM van der Drift , PJ French