M

MA Blauw

34 records found

Authored

High aspect ratio cryogenic etching of silicon with SF6/O2 plasma
Conference paper (2001) - G Cracium, MA Blauw, E.W.J.M. van der Drift, P.J. French

High aspect ratio cyrogenic etching of Silicon with SF6/O2 plasma.
Conference paper (2001) - G Craciun, MA Blauw, E.W.J.M. van der Drift, P.J. French

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.

Development of deep dry etching for intelligent mocromachine devices.

Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.
Conference paper (2001) - MA Blauw, G Craciun, E.W.J.M. van der Drift, P.J. French

Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures.
Conference paper (2001) - G Craciun, MA Blauw, E.W.J.M. van der Drift, P.J. French

Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
Conference paper (2001) - MA Blauw, G Cracium, P.J. French

Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures
Conference paper (2001) - G Cracium, MA Blauw, E.W.J.M. van der Drift, P.J. French

Development of deep dry etching for intelligent mocromachine devices.

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Conference paper (2001) - G Cracium, MA Blauw, Pasqualina M Sarro, P.J. French

Kinetics and Crystal orientation dependence in High Aspect Ratio Silicon Dry Etching.
Journal article (2000) - MA Blauw, T Zijlstra, RA Bakker, E.W.J.M. van der Drift

Radical transport in deep silicon structures during dry etching.
Conference paper (2000) - MA Blauw, T Zijlstra, E.W.J.M. van der Drift

Self-Assembly of pi-Conjugated azomethine oligomers by sequential deposition of monomers from solution.

Self-assembly of phi conjugated azomethine oligomers by sequential deposition of monomers from solution.

Tunneling Spectroscopy Study and Modelling of Electron Transport in Small Conjugated Azomethine Molecules.

Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching.
Conference paper (2000) - MA Blauw, T Zijlstra, RA Bakker, E.W.J.M. van der Drift

Development of Deep Dry Etching Technology for Intelligent Micromachine Devices.
Report (2000) - MA Blauw, E.W.J.M. van der Drift

Growth and scanning tunneling spectroscopy of self-assembled phi-conjugated oligomers.

Scanning Tunneling Spectroscopy on self-assembled p-conjugated oligomers. A. comparison of experiments with electronic models

Growth and characterisation of organic multilayers on gold grown by organic molecular beam deposition