34 records found
1
Climate change resistant coastline by biological in-situ reinforcement of sand
Deep reactive ion etching in through-silicon via technology
Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Processing of inertial sensors using SF6-O2 Cryogenic plasma process
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope
Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
Advanced time-multiplexed plasma etching of high aspect ratio silicon structures
Balancing the etching and passivation in time-multiplexed deep dry etching of silicon.
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
Development of deep dry etching for intelligent mocromachine devices.
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures
High aspect ratio cryogenic etching of silicon with SF6/O2 plasma
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.