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M
MA Blauw
Academic Work (34)
Book chapter (1)
Conference paper (17)
Doctoral thesis (1)
Journal article (12)
Report (3)
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34 records found
1
2
Climate change resistant coastline by biological in-situ reinforcement of sand
Conference paper (2008) -
MA Blauw (author)
,
MP Harkes (author)
,
Mark C.M. van Loosdrecht (author)
,
L.A. van Paassen (author)
,
MA Van (author)
,
M vd Ruyt (author)
Deep reactive ion etching in through-silicon via technology
Book chapter (2007) -
F Roozeboom (author)
,
MA Blauw (author)
,
Y Lamy (author)
,
E van Grunsven (author)
,
W Dekkers (author)
,
JF Verhoeven (author)
,
F van den Heuvel (author)
,
E.W.J.M. van der Drift (author)
,
W. M.M. Kessels (author)
,
MCM van de Sanden (author)
Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias
Conference paper (2006) -
M.A. Wank (author)
,
I Martin (author)
,
MA Blauw (author)
,
R.A.C.M.M. van Swaaij (author)
,
MCM van de Sanden (author)
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Doctoral thesis (2004) -
MA Blauw (author)
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Journal article (2004) -
LD Jiang (author)
,
NOV Plank (author)
,
MA Blauw (author)
,
R Cheung (author)
,
E.W.J.M. van der Drift (author)
Processing of inertial sensors using SF6-O2 Cryogenic plasma process
Conference paper (2003) -
G Craciun (author)
,
H Yang (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
Journal article (2003) -
NOV Plank (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
R Cheung (author)
IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
Conference paper (2003) -
G Craciun (author)
,
H Yang (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation
Journal article (2003) -
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
G Marcos (author)
,
A Rhallabi (author)
Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope
Conference paper (2002) -
G Craciun (author)
,
H Yang (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Journal article (2002) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
Pasqualina M Sarro (author)
,
P.J. French (author)
Advanced time-multiplexed plasma etching of high aspect ratio silicon structures
Journal article (2002) -
MA Blauw (author)
,
G Craciun (author)
,
W.G. Sloof (author)
,
P.J. French (author)
,
E.W.J.M. van der Drift (author)
Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
Conference paper (2002) -
G Craciun (author)
,
H Yang (author)
,
H.W. van Zeijl (author)
,
L.S. Pakula (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.
Conference paper (2001) -
MA Blauw (author)
,
G Craciun (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Development of deep dry etching for intelligent mocromachine devices.
Report (2001) -
MA Blauw (author)
,
MF Craciun (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Conference paper (2001) -
G Cracium (author)
,
MA Blauw (author)
,
Pasqualina M Sarro (author)
,
P.J. French (author)
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
Conference paper (2001) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
Pasqualina M Sarro (author)
,
P.J. French (author)
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
Conference paper (2001) -
MA Blauw (author)
,
G Cracium (author)
,
P.J. French (author)
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures.
Conference paper (2001) -
G Craciun (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
P.J. French (author)
Balancing the etching and passivation in time-multiplexed deep dry etching of silicon.
Journal article (2001) -
MA Blauw (author)
,
T Zijlstra (author)
,
E.W.J.M. van der Drift (author)