Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope

Conference Paper (2002)
Author(s)

G Craciun (TU Delft - Electronic Instrumentation)

H Yang (TU Delft - Electronic Instrumentation)

MA Blauw (TU Delft - QN/Kavli Nanolab Delft)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

Patrick J. French (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2002
Research Group
Electronic Instrumentation
Pages (from-to)
55-58
ISBN (print)
973-0-02472-3

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