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LD Jiang

Journal article (2)

2 records found

1

A novel method for nanoprecision alignment in wafer bonding applications

Journal article (2007) - LD Jiang (author) , Grégory Pandraud (author) , Paddy French (author) , S.M. Spearing (author) , M kraft (author)

Dry etching of SiC in inductively coupled Cl-2/Ar plasma

Journal article (2004) - LD Jiang (author) , NOV Plank (author) , MA Blauw (author) , R Cheung (author) , Emile van der Drift (author)