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Mk
M kraft
Academic Work (3)
Conference paper (2)
Journal article (1)
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3 records found
1
A novel method for nanoprecision alignment in wafer bonding applications
Journal article (2007) -
LD Jiang (author)
,
G. Pandraud (author)
,
P.J. French (author)
,
S.M. Spearing (author)
,
M kraft (author)
Wafer bonding with nanoprecision alignment for micro/nano systems
Conference paper (2007) -
L Jiang (author)
,
G. Pandraud (author)
,
P.J. French (author)
,
SM Spearing (author)
,
M kraft (author)
Nanoprecision alignment for wafer bonding (U-SP-2-I-ICT)
Conference paper (2006) -
G. Pandraud (author)
,
P.J. French (author)
,
Jiang Liudi (author)
,
S.M. Spearing (author)
,
M kraft (author)