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M kraft

Conference paper (2)

Journal article (1)

3 records found

1

Wafer bonding with nanoprecision alignment for micro/nano systems

Conference paper (2007) - L Jiang (author) , Grégory Pandraud (author) , PJ French (author) , SM Spearing (author) , M kraft (author)

A novel method for nanoprecision alignment in wafer bonding applications

Journal article (2007) - LD Jiang (author) , Grégory Pandraud (author) , Paddy French (author) , S.M. Spearing (author) , M kraft (author)

Nanoprecision alignment for wafer bonding (U-SP-2-I-ICT)

Conference paper (2006) - Grégory Pandraud (author) , Paddy French (author) , Jiang Liudi (author) , S.M. Spearing (author) , M kraft (author)