A novel method for nanoprecision alignment in wafer bonding applications

Journal Article (2007)

Author(s)

LD Jiang (External organisation)

G. Pandraud (TU Delft - QN/High Resolution Electron Microscopy)

Patrick J. French (TU Delft - Electronic Instrumentation)

S.M. Spearing (External organisation)

M kraft (External organisation)

Research Group

QN/High Resolution Electron Microscopy

Elektrotechniek CWTS 0.75 <= JFIS < 2.00 Techniek Academic journal papers

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Publication Year

2007

Research Group

QN/High Resolution Electron Microscopy

Issue number

7

Volume number

17

Pages (from-to)

S61-S67

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