IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
Conference Paper
(2003)
Author(s)
G Craciun (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
MA Blauw (TU Delft - QN/Kavli Nanolab Delft)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:d09108d8-b52e-4d47-845e-d74805217de8
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Publication Year
2003
Research Group
Electronic Instrumentation
Bibliographical Note
CD-rom@en
Pages (from-to)
440-444
ISBN (print)
0-7803-8133-5
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