Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

M.A. Wank (TU Delft - Photovoltaic Materials and Devices)

I Martin (TU Delft - Multimedia Computing)

MA Blauw (TU Delft - QN/Kavli Nanolab Delft)

R.A.C.M.M. van Swaaij (TU Delft - Electronic Components, Technology and Materials)

MCM van de Sanden (External organisation)