Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

Conference paper (2006)

Authors

M.A. Wank Photovoltaic Materials and Devices - EEMCS
MA Blauw QN/Kavli Nanolab Delft - AS
R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials - EEMCS
MCM van de Sanden External organisation
Research Group
Photovoltaic Materials and Devices (EEMCS) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Electrical Sustainable Energy

Research Group

Photovoltaic Materials and Devices