Deep anisotropic dry etching of silicon microstructures by high-density plasmas

Doctoral Thesis (2004)
Authors

MA Blauw (TU Delft - QN/Kavli Nanolab Delft)

Research Group
QN/Kavli Nanolab Delft
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Publication Year
2004
Research Group
QN/Kavli Nanolab Delft
ISBN (print)
90-901 7644-6

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