Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Doctoral Thesis
(2004)
Author(s)
MA Blauw (TU Delft - QN/Kavli Nanolab Delft)
Contributor(s)
S Radelaar – Promotor
Patrick J. French – Copromotor
Emile van der Drift – Copromotor
Research Group
QN/Kavli Nanolab Delft
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https://resolver.tudelft.nl/uuid:839a50e4-29a9-490f-950a-32b3a2ca9da7
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Publication Year
2004
Research Group
QN/Kavli Nanolab Delft
Bibliographical Note
verdeling: 70% NAF / 30% EWI@en
ISBN (print)
90-901 7644-6
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