Y Lamy | TU Delft Repository

YL

Y Lamy

Book chapter (1)

Conference paper (1)

Journal article (1)

3 records found

1

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Conference paper (2009) - M Saadaoui (author), H.W. van Zeijl (author), Pasqualina M Sarro (author), HTM Pham (author), HC MKnoops (author), W. M.M. Kessels (author), MCM van de Sanden (author), F Roozeboom (author), Y Lamy (author), KB Jinesh (author), W. Besling (author)

Continuous deep reactive ion etching of tapered via holes for three-dimensional integration

Journal article (2008) - R Li (author), Y Lamy (author), WFA Besling (author), F Roozeboom (author), Pasqualina M Sarro (author)

Deep reactive ion etching in through-silicon via technology

Book chapter (2007) - F Roozeboom (author), MA Blauw (author), Y Lamy (author), E van Grunsven (author), W Dekkers (author), JF Verhoeven (author), F van den Heuvel (author), E.W.J.M. van der Drift (author), W. M.M. Kessels (author), MCM van de Sanden (author)