Processing of inertial sensors using SF6-O2 Cryogenic plasma process
Conference Paper
(2003)
Author(s)
G Craciun (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
L Pakula (TU Delft - Electronic Instrumentation)
MA Blauw (TU Delft - QN/Kavli Nanolab Delft)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:07d65e1e-f567-4255-9e07-6f1969aeb50c
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
683-686
ISBN (print)
90-73461-39-1
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