Determination of line edge roughness in low-dose top-down scanning electron microscopy images
Journal Article
(2014)
Author(s)
Thomas Verduin (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0946236b-3db2-4812-a536-96a8f4b56518
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Publication Year
2014
Language
English
Research Group
ImPhys/Charged Particle Optics
Volume number
9050
Pages (from-to)
1-3
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