Resolution limits in electron-beam-induced deposition
Conference Paper
(2005)
Author(s)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
Kees C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0a9fa256-cafb-46bf-8ff5-c8a6302b303d
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
9-16
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