Thermally Driven Sound Source

Application of CNT nanofoams

Master thesis (2015)

Authors

H. Yi

Contributors

R.H. Poelma (mentor)

G.Q. Zhang (mentor)

H.W. Van Zeijl (mentor)

Programme

Microelectronics (Mechanical, Maritime and Materials Engineering) (TU Delft)

3D CNT Thermoacoustic Nanofoam Micro fabrication Vertical

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http://resolver.tudelft.nl/uuid:0b559d5b-66d1-4b61-a6c2-594307d55f31

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Published Date

26-10-2015

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Programme

Microelectronics

Abstract

On chip grown CNT nanofoam has a large surface to volume ratio and excellent thermal electrical properties, which is suitable to be used as a thermoacoustic heater. The highly porous foam exchanges heat with surrounding air efficiently. Every processing step is specifically designed to be CMOS compatible using cleanroom microfabrication. This design is expected to be a novel, robust, efficient TA device. All the advantages allow massive, parallel production, miniaturization and integration.

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